MCQ–Series: High Pressure Gas Mass Flow Controllers
- Description
Description
MCQ-Series High Pressure Gas Mass Flow Controllers
rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for operating pressures up to 320 PSIA.
MCQ-Series performance
- Available full scale ranges: 10 SCCM to 3000 SLPM
- Steady state control range: 0.5% – 100% of full scale
- Standard accuracy calibration, NIST–traceable: ±0.6% of reading or ±0.1% of full scale, whichever is greater
- Repeatability: ±0.1% of full scale
- Typical control response time: as low as 100 ms
- Warm-up time: <1 s
MCQ-Series operating conditions
- Compatible gases: 98 pre–loaded selectable gas calibrations; additional mixtures definable with COMPOSER™
- Operating temperature: –10°C to +60°C
- Full scale operating pressure: 320 PSIA
- Max differential pressure: 75 PSID
- Proof pressure: 400 PSIA
- User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
