PRODUCTS - MCE–Series: SEMI Standard Gas Mass Flow Controllers

Description

MCE-Series SEMI Standard Gas Mass Flow Controllers 

are equipped with 1/4″ VCR fittings and match end-to-end with SEMI standard MFCs, for easy drop-in upgrades to vacuum deposition fixtures. Control mass flow or pressure of 98+ gases.

MCE-Series performance (most products)

• Available full scale ranges: 0.5 SCCM to 20 SLPM
• Steady state control range: 0.01% – 100% of full scale
• Standard accuracy calibration, NIST–traceable: ±0.6% of reading or ±0.1% of full scale, whichever is greater
• Optional high-accuracy calibration, NIST–traceable: ±0.5% of reading or ±0.1% of full scale, whichever is greater
• Repeatability: ±(0.1% of reading + 0.02% of full scale)
• Typical control response time: as fast as 30 ms
• Warm-up time: <1 s

MCE-Series operating conditions

• Compatible gases: 98+ preloaded selectable gas calibrations
• Operating temperature: –10°C to +60°C
• Full scale operating pressure: 160 PSIA
• Repeatability: ±(0.1% of reading + 0.02% of full scale)
• Typical control response time: as fast as 30 ms
• Warm-up time: <1 s