PRODUCTS - MCVS–Series: Anti-Corrosive Vacuum Gas Mass Flow Controllers

Description

MCVS-Series Anti-Corrosive Vacuum Gas Mass Flow Controllers 

are equipped with a pneumatic shutoff valve, and can be used to control mass flow or pressure of 128+ gases (including 30+ corrosives) in vacuum applications.

MCVS-Series performance (most products)

• Available full scale ranges: 0.5 SCCM to 20 SLPM
• Steady state control range: 1% – 100% of full scale
• Standard accuracy calibration, NIST–traceable: ±0.8% of reading and ±0.2% of full scale
• Optional high-accuracy calibration, NIST–traceable: ±0.4% of reading or ±0.2% of full scale
• Repeatability: ±0.2% of full scale
• Typical control response time: as fast as 30 ms
• Pneumatic valve leak integrity: 1 x 10-9 atm-cc/sec helium max
• Warm-up time: <1 s

MCVS-Series operating conditions

• Compatible gases: 128+ preloaded selectable gas calibrations
• Operating temperature: –10°C to +60°C
• Full scale operating pressure: 160 PSIA
• Max differential pressure: 75 PSID
• Proof pressure: 200 PSIA
• User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)