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MCV-Series Vacuum Gas Mass Flow Controllers 

are equipped with a pneumatic shutoff valve, and can be used to control mass flow or pressure of 98+ gases in vacuum applications.

MCV-Series performance (most products)

  • Available full scale ranges: 0.5 SCCM to 20 SLPM
  • Steady state control range: 0.01% – 100% of full scale
  • Standard accuracy calibration, NIST–traceable: ±0.6% of reading or ±0.1% of full scale, whichever is greater
  • Optional high-accuracy calibration, NIST–traceable: ±0.5% of reading or ±0.1% of full scale, whichever is greater
  • Repeatability: ±(0.1% of reading + 0.02% of full scale)
  • Typical control response time: as fast as 30 ms
  • Pneumatic valve leak integrity: 1 x 10-9 atm-cc/sec helium max
  • Warm-up time: <1 s

MCE/MCV-Series operating conditions

  • Compatible gases: 98+ preloaded selectable gas calibrations
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 175 PSIA
  • User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)