- Description
Description
M–Series Mass Flow Meters
simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature for 98+ gases from 0.01% to 100% of full scale.
Standard specs
- Full scale ranges: 0.5 SCCM to 5,000 SLPM
- Measurement range: 0.01% – 100% of full scale
- Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
- Optional high accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
- Repeatability: 0.1% of reading and 0.02% of full scale
- Response time: <10 ms
- Operating temperature: –10°C to +60°C
- Full scale operating pressure: 160 PSIA (11 barA)
Features
- Simultaneously measure volumetric flow, mass flow, gas pressure, and gas temperature.
- Field-adjustable engineering units and STP/NTP conditions.
- Select process gas from 98+ preloaded NIST-traceable gas calibrations.
- Define and store 20 custom gas mixtures of up to 5 constituent gases.
- Read measurements from the backlist display and control configuration using the integrated touchpad.
- Optional integrated dual flow totalizers and alarms.
