MCDS–Series: Anti-Corrosive Bidirectional Gas Mass Flow Controllers
- Description
Description
MCDS-Series Anti-Corrosive Bidirectional Gas Mass Flow Controllers
can control mass flow, volumetric flow, or gas pressure in both directions while simultaneously measuring flow, gas pressure, and gas temperature of up to 130 gases, including 30+ corrosives.
MCDS-Series performance
- Available full scale ranges: 0.5 SCCM to 5000 SLPM
- Steady state control range: 1% – 100% of full scale
- Standard accuracy calibration, NIST–traceable: ±(0.8% of reading + 0.2% of full scale)
- Optional high-accuracy calibration, NIST–traceable: ±(0.4% of reading + 0.2% of full scale)
- Repeatability: ±0.2% of full scale
- Typical control response time: as fast as 30 ms
- Warm–up time: <1 s
MCDS-Series operating conditions
- Compatible gases: up to 130 pre–loaded selectable gas calibrations; additional mixtures definable with COMPOSER™
- Operating temperature: –10°C to +60°C
- Full scale operating pressure: 160 PSIA
- Max differential pressure: 75 PSID
- Proof pressure: 175 PSIA
- User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
