MCS–Series: Anti-Corrosive Gas Mass Flow Controllers
- Description
Description
MCS-Series Anti-Corrosive Gas Mass Flow Controllers
rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for 128+ gases, including 32 corrosives.
MCS-Series performance
- Available full scale ranges: 0.5 SCCM to 5000 SLPM
- Steady state control range: 1% – 100% of full scale
- Standard accuracy calibration, NIST-traceable: ±(0.8% of reading + 0.2% of full scale)
- Optional high-accuracy calibration, NIST-traceable: ±(0.4% of reading + 0.2% of full scale)
- Repeatability: ±0.2% of full scale
- Typical control response time: as fast as 30 ms
- Warm-up time: <1 s
MCS-Series operating conditions
- Compatible gases: up to 130 pre–loaded selectable gas calibrations; additional mixtures definable with COMPOSER™
- Operating temperature: –10°C to +60°C
- Full scale operating pressure: 160 PSIA
- Max differential pressure: 75 PSID
- Proof pressure: 175 PSIA
- User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
