MCVS–Series: Anti-Corrosive Vacuum Gas Mass Flow Controllers

MCV–Series: Vacuum Gas Mass Flow Controllers
SIEMENS – DUCT POINT TEMP SENSOR

Categories: , Tags: , , , , , , , ,

Description

MCVS-Series Anti-Corrosive Vacuum Gas Mass Flow Controllers 

are equipped with a pneumatic shutoff valve, and can be used to control mass flow or pressure of 128+ gases (including 30+ corrosives) in vacuum applications.

MCVS-Series performance (most products)

  • Available full scale ranges: 0.5 SCCM to 20 SLPM
  • Steady state control range: 1% – 100% of full scale
  • Standard accuracy calibration, NIST–traceable: ±0.8% of reading and ±0.2% of full scale
  • Optional high-accuracy calibration, NIST–traceable: ±0.4% of reading or ±0.2% of full scale
  • Repeatability: ±0.2% of full scale
  • Typical control response time: as fast as 30 ms
  • Pneumatic valve leak integrity: 1 x 10-9 atm-cc/sec helium max
  • Warm-up time: <1 s

MCVS-Series operating conditions

  • Compatible gases: 128+ preloaded selectable gas calibrations
  • Operating temperature: –10°C to +60°C
  • Full scale operating pressure: 160 PSIA
  • Max differential pressure: 75 PSID
  • Proof pressure: 200 PSIA
  • User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)