MC–Series: Gas Mass Flow Controllers
- Description
Description
Bidirectional Mass Flow Controllers
MCD-Series Bidirectional Gas Mass Flow Controllers
can control mass flow, volumetric flow, or gas pressure in both directions while simultaneously measuring flow, pressure, and temperature.
MCD-Series standard specs
- Full scale ranges: 0.5 SCCM to 3000 SLPM
- Control range: 0.01% to 100% of full scale
- Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
- Optional high-accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
- Repeatability: ±(0.1% of reading + 0.02% of full scale)
- Response time: as fast as 30 ms
- Warm–up time: <1 s
- Operating temperature: –10°C to +60°C
- Full scale operating pressure: 160 PSIA
