MCV–Series: Vacuum Gas Mass Flow Controllers
- Description
Description
MCV-Series Vacuum Gas Mass Flow Controllers
are equipped with a pneumatic shutoff valve, and can be used to control mass flow or pressure of 98+ gases in vacuum applications.
MCV-Series performance (most products)
- Available full scale ranges: 0.5 SCCM to 20 SLPM
- Steady state control range: 0.01% – 100% of full scale
- Standard accuracy calibration, NIST–traceable: ±0.6% of reading or ±0.1% of full scale, whichever is greater
- Optional high-accuracy calibration, NIST–traceable: ±0.5% of reading or ±0.1% of full scale, whichever is greater
- Repeatability: ±(0.1% of reading + 0.02% of full scale)
- Typical control response time: as fast as 30 ms
- Pneumatic valve leak integrity: 1 x 10-9 atm-cc/sec helium max
- Warm-up time: <1 s
MCE/MCV-Series operating conditions
- Compatible gases: 98+ preloaded selectable gas calibrations
- Operating temperature: –10°C to +60°C
- Full scale operating pressure: 160 PSIA
- Max differential pressure: 75 PSID
- Proof pressure: 175 PSIA
- User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
