MCES-Series: Anti-Corrosive SEMI Standard Gas Mass Flow Controllers
- Description
Description
MCES-Series Anti-Corrosive SEMI Standard Gas Mass Flow Controllers
are equipped with 1/4″ VCR fittings and match end-to-end with SEMI standard MFCs, for easy drop-in upgrades to vacuum deposition fixtures. Control mass flow or pressure of 128+ gases, including 30+ corrosives.
MCES-Series performance (most products)
- Available full scale ranges: 0.5 SCCM to 20 SLPM
- Steady state control range: 1% – 100% of full scale
- Standard accuracy calibration, NIST–traceable: ±0.8% of reading and ±0.2% of full scale
- Optional high-accuracy calibration, NIST–traceable: ±0.4% of reading or ±0.2% of full scale
- Repeatability: ±0.2% of full scale
- Typical control response time: as fast as 30 ms
- Warm-up time: <1 s
MCES/MCVS-Series operating conditions
- Compatible gases: 128+ preloaded selectable gas calibrations
- Operating temperature: –10°C to +60°C
- Full scale operating pressure: 160 PSIA
- Max differential pressure: 75 PSID
- Proof pressure: 200 PSIA
- User selectable reference conditions (defaults): 25°C & 1 ATM (STP) and 0°C & 1 ATM (NTP)
